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We present a novel ALD-based approach for the synthesis of bimetallic materials consisting of a noble metal along with a nonnoble metal such as Pt-M (M = In, Ga, Sn, etc.), with a precise control on the composition and size. First, a bilayer consisting of a metal oxide and a Pt film of the desired thickness is deposited on to the substrate. The film is then subjected to a temperature programmed reduction (TPR) under H2 atmosphere. In situ X-ray diffraction (XRD) measurements during TPR revealed the formation of Pt±M bimetallic alloys with a phase determined by the Pt/(Pt + M) atomic ratio of the as-deposited bilayer. Scanning electron microscopic (SEM) analysis revealed the formationnanoparticles after annealing, with the particle size controlled by the initial total thickness of the bilayer

(Invited) Atomic Layer Deposition of Nanoalloys of Noble and Non-Noble Metals