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This paper presents the fabrication technology of microlensesmaintaining a high reproducibility of their characteristics with lowcost. The objective of microlenses is to be integrated into imagersin CMOS technology to allow stereoscopic vision. The fabricatedmicrolenses form cylindrical arrays to be placed above the opticalfilters and photodetectors, in order to potentiate stereoscopic visionand at the same time maximizing the color fidelity. An array ofoptical filters centered at the primary colors will enable amulticolor usage. The AZ4562 material was the photoresistselected for fabricating the microlenses. The cylindrical shape isobtained by reflowing the photoresist using the hot-plate technique.This work and Rui Pedro Rocha were fully supported by the Portuguese Foundation forScience and Technology under the project FCT/PTDC/EEA-ELC/109936/2009 and thefinancial grant SFRH/BD/33733/2009, respectively

Fabrication Methodology of Microlenses for Stereoscopic Imagers Using Standard CMOS Process