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A nonstandard methodology in simulator construction is introduced along with its application to on-line simulation of semiconductor fabs. The simulation proceeds by sequentially rewriting state description, written in a language. A text in the state description language consists of a collection of titled two-column tables. The description is stored in an in-core database equipped with a splay tree algorithm. The initial state representing the fab's present state is downloaded from the fab's database. The simulation is for lotwise trace prediction needed for day-today fab operation rather than to estimate steady state performance indices. Its use at production sites involves frequent model modification. A one-month simulation of a clean room operation involving 1,300 lots and 200 machines is processed in five to ten minutes on a workst at ion, using 30 megabytes of internal memory. The execution time is 0(/ogN), where N is the number of lots and machines; memory usage is proportional to N. The simulator enjoys an extremely small source code: 1,200 lines in C. 1 INTRODUCTION This paper proposes to look at discrete event simulation as a form of language processing. The word " language " here means a system of symbols used to describe the state of the object to simulate rather than a simulation language such as SIMULA or GPSS. Consider the case of simulating a semiconductor fab. The contents of a state description would be like this: " Lot L consists of W wafers of product type P. Lot L is presently being processed by machine kf, scheduled to finish at time t.Machine M is processing lot L and will go through maintenance after time s. Etc... " The system of symbols used to describe this is called a state description language. The language may resemble a natural language as above, or may be more succinctly coded. Simulation proceeds by rewriting such a description step by step according to a set of rules. This process parallels interpretive execution of a computer language. The language is to be used by a team involved in building a model for negotiating an agreement among themselves and to communicate with computers for discovering mistakes, delegating execution, and receiving the result reports. We design a common language for people and machines, taking them as equals with different characteristics and abilities. Consequently west art with what computers are rather than what they should be. This is in contrast with modern computer …

Simulation through explicit state description and its application to semiconductor fab operation