Open AccessLow Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect
Author(s) -
Faisal Mohd-Yasin,
David J. Nagel,
Duu Sheng Ong,
Can E. Korman,
H. T. Chuah
Publication year - 2008
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.1143/jjap.47.5270
Subject(s) - accelerometer , noise (video) , acceleration , capacitive sensing , acoustics , limiting , noise spectral density , noise floor , white noise , noise measurement , noise temperature , physics , materials science , noise figure , phase noise , electrical engineering , optics , noise reduction , optoelectronics , engineering , computer science , telecommunications , cmos , artificial intelligence , image (mathematics) , amplifier , classical mechanics , quantum mechanics , mechanical engineering
A noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/ f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. A temperature dependent and an acceleration dependant of the noise are found in the accelerometers, in agreement and contract of the theories, respectively.No Full Tex
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