Open AccessImpacts of Amplitude Modulation of RF Discharge Voltage on the Growth of Nanoparticles in Reactive Plasmas
Author(s) -
Kunihiro Kamataki,
Hiroshi Miyata,
Kazunori Koga,
Giichiro Uchida,
Naho Itagaki,
Masaharu Shiratani
Publication year - 2011
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.1143/apex.4.105001
Subject(s) - nanoparticle , nucleation , plasma , radical , amplitude , materials science , modulation (music) , chemistry , analytical chemistry (journal) , nanotechnology , chromatography , organic chemistry , optics , physics , acoustics , quantum mechanics
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