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The surface structure of SrTiO3(001) thin films homoepitaxially grown by PLDin step-flow mode was characterized using low temperature STM. It was foundthat one-dimensional (1D) TiOx-based nanostructures were formed on the thinfilm surface and their density increased with increasing thin film thickness.Most of the 1D nanostructures disappeared after a post-deposition annealing,indicating that this structure is metastable due to the nonequilibrium growthmode. The resulting surface after annealing exhibited similar features to thatof a thinner film, having a domain structure with (2x1) and (1x2)reconstructions, but with fewer oxygen-vacancy-type defects. These resultsimply that the step-flow growth is likely to produce TiOx-rich surface and Tideficiencies in the film. By the post-deposition annealing, the rich TiOx woulddiffuse from the surface into the film to compensate defects associated with Tivacancies and oxygen vacancies, resulting in the stable surface structure withfewer oxygen vacancies. Thus, STM measurements can provide us with amicroscopic picture of surface stoichiometry of thin films originating in thedynamics of the growth process, and can present a new approach for designingfunctional oxide films.

Atomically Resolved Surface Structure of SrTiO3(001) Thin Films Grown in Step-Flow Mode by Pulsed Laser Deposition