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Room temperature ferromagnetic semiconductor rutile Ti1-xCoxO2-\delta (101)epitaxial thin films were grown on r-sapphire substrates by a dc sputteringmethod. Ferromagnetic magnetization, magnetic circular dichroism, and anomalousHall effect were clearly observed at room temperature in sputter-grown filmsfor the first time. The magnetization value is nearly as large as 3\mu B/Cothat is consistent with the high spin state Co2+ in this compound recentlyestablished by spectroscopic methods. Consequently, its originally largemagneto-optical response is further enhanced.

Room Temperature Ferromagnetic Semiconductor Rutile Ti1-xCoxO2-\delta Epitaxial Thin Films Grown by Sputtering Method