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Lead-free piezoelectric thin films of 0.055BaZrO 3 –0.935(K[Formula: see text]Na[Formula: see text]Li[Formula: see text])NbO 3 –0.01(Bi[Formula: see text]Na[Formula: see text])TiO 3  (BZ–KNLN–BNT) were fabricated on (100)-LaNiO 3 /SiO 2 /Si substrates. The Pechini (polymeric precursor) method was carried out to prepare the complicated multi-component precursor solution. This method was suited for controlling the complex components accurately. The films crystallized at 700[Formula: see text]C showed a (100) pc -oriented perovskite structure, whose grain size was about 200[Formula: see text]nm and thickness was about 700[Formula: see text]nm. The Curie temperature [Formula: see text] c  of the films was 292[Formula: see text]C that was near to that of the bulk ceramics. The preparation method used in this work provided a possibility for the application of multi-component lead-free piezoelectric films.

journal of advanced dielectrics

Preparation of 0.055BaZrO3–0.935(K0.45Na0.5Li0.05)NbO3–0.01(Bi0.5Na0.5)TiO3 piezoelectric thin films from precursor solution by Pechini method