Open AccessTime and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates
Author(s) -
Sven Hofmann,
Koen van Gils,
Steven van der Linden,
Sylvain Iséni,
Peter Bruggeman
Publication year - 2014
Publication title -
the european physical journal d
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.348
H-Index - 89
eISSN - 1434-6079
pISSN - 1434-6060
DOI - 10.1140/epjd/e2014-40430-3
Subject(s) - plasma , materials science , electrode , substrate (aquarium) , optoelectronics , atmospheric pressure , atmospheric pressure plasma , rf power amplifier , radio frequency , dissipation , dielectric , electric field , analytical chemistry (journal) , chemistry , electrical engineering , physics , amplifier , oceanography , cmos , quantum mechanics , engineering , thermodynamics , geology , chromatography , meteorology
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