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Pure metals (Cu, Ti, Zr, V, Pd) and diluted Pd-alloys (Pd-Ag, Pd-Pt, Pd-Ru,Pd-Rh) were implanted by 25 keV deuterium ions at fluences in the range(1.2{\div}2.3)x1022 D+/m2. The post-treatment depth distributions of deuteriumions were measured 10 days and three months after the implantation usingElastic Recoil Detection Analysis (ERDA) and Rutherford Backscattering (RBS).Comparison of the obtained results allowed to make conclusions about relativestability of deuterium and hydrogen gases in pure metals and diluted Pd alloys.Very high diffusion rates of implanted deuterium ions from V and Pd pure metalsand Pd alloys were observed. Small-angle X-ray scattering revealed formation ofnanosized defects in implanted corundum and titanium.

Depth concentrations of deuterium ions implanted into some pure metals and alloys