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We report on deterministic generation of 18-qubit genuinely entangledGreenberger-Horne-Zeilinger (GHZ) state and multi-component atomicSchr\"{o}dinger cat states of up to 20 qubits on a quantum processor, whichfeatures 20 superconducting qubits interconnected by a bus resonator. Byengineering a one-axis twisting Hamiltonian enabled by the resonator-mediatedinteractions, the system of qubits initialized coherently evolves to anover-squeezed, non-Gaussian regime, where atomic Schr\"{o}dinger cat states,i.e., superpositions of atomic coherent states including GHZ state, appear atspecific time intervals in excellent agreement with theory. With highcontrollability, we are able to take snapshots of the dynamics by plottingquasidistribution $Q$-functions of the 20-qubit atomic cat states, and globallycharacterize the 18-qubit GHZ state which yields a fidelity of $0.525\pm0.005$confirming genuine eighteen-partite entanglement. Our results demonstrate thelargest entanglement controllably created so far in solid state architectures,and the process of generating and detecting multipartite entanglement maypromise applications in practical quantum metrology, quantum informationprocessing and quantum computation.

Observation of multi-component atomic Schr\"odinger cat states of up to 20 qubits