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Optical frequency combs, coherent light sources that connect opticalfrequencies with microwave oscillations, have become the enabling tool forprecision spectroscopy, optical clockwork and attosecond physics over the pastdecades. Current benchmark systems are self-referenced femtosecond mode-lockedlasers, but four-wave-mixing in high-Q resonators have emerged as alternativeplatforms. Here we report the generation and full stabilization ofCMOS-compatible optical frequency combs. The spiral microcomb's twodegrees-of-freedom, one of the comb line and the native 18 GHz comb spacing,are first simultaneously phase-locked to known optical and microwavereferences. Second, with pump power control, active comb spacing stabilizationimproves the long-term stability by six orders-of-magnitude, reaching aninstrument-limited 3.6 mHz/sqrt(t) residual instability. Third, referencingthirty-three of the nitride frequency comb lines against a fiber comb, wedemonstrate the comb tooth-to-tooth frequency relative inaccuracy down to 53mHz and 2.8x10-16, heralding unprecedented chip-scale applications in precisionspectroscopy, coherent communications, and astronomical spectrography.

A stabilized 18 GHz chip-scale optical frequency comb at 2.8x10-16 relative inaccuracy