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In order to prepare for the construction phase of the two Deformable Mirrors (DMs), which will be used in the Thirty Meter Telescope (TMT) first light Adaptive Optics (AO) system, Cilas has advanced the design of these two large size piezo DMs and has manufactured and tested a scaled demonstration prototype. The work done allowed significant reduction of the risks related to the demanding specifications of the TMT DMs; the main issues were: (i) Large pupil (up to 370 mm) and high order (up to 76x76); (ii) Relatively low operational temperature (DMs working at -30\ub0C); (iii) New piezo material. It is important to develop such a prototype to take into account these three specifications all together (dimension, low temperature and new piezo material). The new prototype is a 6x60 actuators and has the same characteristics as the future TMT DMs. In this paper, we give the conclusions of the work through the presentation of the following items: (i) Design and finite element analysis of the two DMs and prototype; (ii) Test results obtained with the prototype with validation of the finite element analysis and compliance with the TMT AO specifications; (iii) Special focus on thermal behavior, actuator reliability and shape at rest stability. \ua9 2012 SPIE.Peer reviewed: YesNRC publication: Ye

TMT DMs final design and advanced prototyping results at Cilas