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MIT Lincoln Laboratories and MIT Kavli Institute for Astrophysics and Space Research have developed an active pixel sensor for use as a photon counting device for imaging spectroscopy in the soft X-ray band. A silicon-on-insulator (SOI) readout circuit was integrated with a high-resistivity silicon diode detector array using a per-pixel 3D integration technique developed at Lincoln Laboratory. We have tested these devices at 5.9 keV and 1.5 keV. Here we examine the interpixel cross-talk measured with 5.9 keV X-rays.United States. National Aeronautics and Space Administration (NASA) (Grant NNG06WC08G

Interpixel crosstalk in a 3D-integrated active pixel sensor for x-ray detection