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Circular and linear zone plates have been fabricated on the surface ofsilicon crystals for the energy of 8 keV by electron beam lithography and deepion plasma etching methods. Various variants of compound zone plates withfirst, second, third diffraction orders have been made. The zone relief heightis about 10 mkm, the outermost zone width of the zone plate is 0.4 mkm. Theexperimental testing of the zone plates has been conducted on SPring-8 and ESRFsynchrotron radiation sources. A focused spot size and diffraction efficiencymeasured by knife-edge scanning are accordingly 0.5 mkm and 39% for the firstorder circular zone plate.Comment: 5 pages, 7 figure

High-efficiency and low-absorption Fresnel compound zone plates for hard X-ray focusing