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Characterization tools have been developed to study the performance characteristics and reliability of surface mi- cromachined actuators. These tools include 1) the ability to electrically stimulate or stress the actuator, 2) the capability to visually inspect the devices in operation, 3) a method for capturing operational information, and 4) a method to e x- tract performance characteristics from the operational in- formation. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive ac- tuator.

<title>Development of characterization tools for reliability testing of micro-electro-mechanical system actuators</title>