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Recently there has been an increasing demand to perform real-time in-situ chemical detection of hazardous materials, contraband chemicals, and explosive chemicals. Currently, real-time chemical detection requires rather large analytical instrumentation that are expensive and complicated to use. The advent of inexpensive mass produced MEMS devices opened-up new possibilities for chemical detection. For example, microcantilevers were found to respond to chemical stimuli by undergoing changes in their bending and resonance frequency even when a small number of molecules adsorb on their surface. In our present studies we extended this concept by studying changes in both the adsorption-induced stress and photo-induced stress as target chemicals adsorb on the surface of microcantilevers. For example, microcantilevers that have adsorbed molecules will undergo photo-induced bending that depends on the number of adsorbed molecules on the surface. However, microcantilevers that have undergone photo-induced bending will adsorb differently molecules on their surfaces. Depending on the photon wavelength and microcantilever material, the microcantilever can be made to bend by expanding or contracting. This is important in cases where the photo- induced bending of microcantilevers for chemical detection.

Chemical detection based on adsorption-induced and photo-induced stresses in MEMS devices