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Amorphous carbon films with variable sp3 content were produced by ArF pulsed laser deposition. An in-situ ion probe was used to measure kinetic energy of C+ ions. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for inter-laboratory comparisons. Electron energy loss spectroscopy and spectroscopic ellipsometry measurement reveal that tetrahedral amorphous carbon films with the most diamond-like properties are obtained at the C ion kinetic energy of approximately 90 eV. Film properties are uniform within a 12-15 degrees angle from the plume centerline. Tapping-mode atomic force microscope measurements show that films deposited at near- optimum kinetic energy are extremely smooth, with rms roughness of only approximately 1 angstrom over distances of several hundred nm. Field emission (FE) measurements show that ta-C does not appear to be a good electron emitter. After conditioning of ta-C films deposited on n-type Si a rather high turn-on voltage of approximately 50 V/micrometers was required to draw current of approximately 1 nA to the probe. The emission was unstable and typically ceased after a few minutes of operation. The FE tests of ta-C and other materials strongly suggest that surface morphology plays a dominant role in the FE process, in agreement with conventional Fowler-Nordheim theory.

<title>Pulsed-laser-deposited amorphous diamond and related materials: synthesis, characterization, and field emission properties</title>