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Modelling the scattering of focused, coherent light by nano-scale structuresis oftentimes used to reconstruct or infer geometrical or material propertiesof structures under investigation in optical scatterometry. This comprises bothperiodic and aperiodic nano-structures. Coherent Fourier scatterometry withfocused light exploits the diffraction pattern formed by the nano-structures inFourier plane. While the scattering of a focused beam by a spatially isolatedscatterer is a standard modelling task for state-of-the art electromagneticsolvers based, e.g., on the finite element method, the case of periodicallystructured samples is more involved. In particular when the focused lightcovers several grating periods of as it is commonly the case. We will present acoherent illumination model for scattering of focused beams such as Gaussian --and Bessel -- beams by periodic structures such as line gratings. The modelallows to take into account optical wavefront aberrations in optical systemsused for both, the illumination and detection of the scattered fields. Wecompare the model with strategies implemented on large-scale super-cells andinverse Floquet-transform strategies to superimpose both near- and far- fieldscoherently.

Forward simulation of coherent beams on grating structures for coherent scatterometry