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Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro-and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.

High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy