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The use of the X-ray lithography to produce blazed diffractive optical elements (DOEs) is described. The proposed method allows one to make highly efficient blazed DOE with a deep phase profile (ten wavelengths and more) using a single X-ray mask with a binary transmission pattern. Unlike the well-known multilevel DOEs, blazed ones do not involve fabrication and aligning of a set of masks. DOEs with a profile depth of 10 micrometers and more and zone sizes of down to 1 micrometers can be obtained due to the short wavelength and high penetrability of X- rays. The first experimental samples of blazed DOEs with a 10 micrometers -height profile (lenses and gratings) were fabricated by X-ray lithography with synchrotron radiation using the X-ray masks, prepared in accordance with the pulse-width modulation algorithm. Diffraction efficiency for lenses was measured for white light. It is higher than 80 percent for the central part of the lenses (inside a 10 mm diameter) and about 60 percent for an area of 20 mm diameter.

<title>New application for x-ray lithography: fabrication of blazed diffractive optical elements with a deep-phase profile</title>