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A new method for calibrating optical scanning profilometers is presented. Especially adapted to spherical and aspherical profile measurements, it shows an increase of accuracy bigger than one order of magnitude for radius of curvature measurements. Calibration of vertical scaling is obtained with a reduction of its uncertainty by a factor larger than 2, which also demonstrates the advantage of this method for any surface measurements. Using commercially available reference balls, this method is easily implementable.

Improved calibration of vertical scanning optical profilometers for spherical profiles measurements