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An Immersion grating is a powerful optical device for the infrared high-resolution spectroscope. We already fabricated the large CdZnTe(CZT) immersion grating (Sukegawa et al. (2012), Fig.1)[1][2][3] and Germanium(Ge) immersion grating (Sukegawa et al. (2015), Fig.2)[4]. Ge is the best material for a mid-infrared immersion grating because of Ge has very large reflective index (n=4.0).

Development of INP immersion grating for the near- to mid-infrared wavelength