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Copyright 2017 Society of Photo-\udOptical Instrumentation Engineers.\ud One print or electronic copy may be made for \udpersonal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial \udpurposes, or modification of the content of the paper are prohibitedA single-shot technique to measure areal profiles on optically smooth and rough surfaces and for applications in non-cooperative environments is presented. It is based on hyperspectral interferometry (HSI), a technique in which the output of a white-light interferometer provides the input to a hyperspectral imaging system. Previous HSI implementations suffered from inefficient utilisation of the available pixels which limited the number of measured coordinates and/or unambiguous depth range. In this paper a >20-fold increase in pixel utilization is achieved through the use of a 2-D microlens array as proposed for integral field units in astronomy applications. This leads to a 35×35 channel system with an unambiguous depth range of 0.88 mm

High-throughput single-shot hyperspectral interferometer for areal profilometry based on microlens array integral field unit