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The micro-sensor field is presently proliferating with designs and approaches. We have developed a micro-spectrometer for sensing applications containing five precision surfaces, including two off-axis aspheres. The entire monolith is less than six cubic centimeters in volume. This particular design contains a bandwidth of about 2 micrometers which is centered at 980 nm. Once an appropriate starting substrate was produced, the entire system was diamond turned to maintain the required surface figure, inter-surface spacing, and surface tilts. Only three diamond turned fixtures were needed to produce the monolith. The results proved to be more than adequate for many sensing applications. Slightly altered designs could easily be produced containing different bandwidths and resolutions as needed by the customer. Due to the spectrum of interest and the fabrication method, PMMA was the material chosen for this sensor. Other designs configurations incorporating BK7 and sapphire are presently being studied.

<title>Design, fabrication, and testing of micro-optical sensors containing multiple aspheres</title>