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Methods for solving Maxwell's equations are integral part of opticalmetrology and computational lithography setups. Applications require accurategeometrical resolution, high numerical accuracy and/or low computation times.We present a finite-element based electromagnetic field solver relying onunstructured 3D meshes and adaptive hp-refinement. We apply the method forsimulating light scattering off arrays of high aspect-ratio nano-posts andFinFETs.

hp-finite element method for simulating light scattering from complex 3D structures