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Silicon-organic hybrid integrated devices have emerging applications rangingfrom high-speed optical interconnects to photonic electromagnetic-fieldsensors. Silicon slot photonic crystal waveguides (PCWs) filled withelectro-optic (EO) polymers combine the slow-light effect in PCWs with the highpolarizability of EO polymers, which promises the realization ofhigh-performance optical modulators. In this paper, a broadband,power-efficient, low-dispersion, and compact optical modulator based on an EOpolymer filled silicon slot PCW is presented. A small voltage-length product ofV{\pi}*L=0.282Vmm is achieved, corresponding to an unprecedented record-higheffective in-device EO coefficient (r33) of 1230pm/V. Assisted by a backsidegate voltage, the modulation response up to 50GHz is observed, with a 3-dBbandwidth of 15GHz, and the estimated energy consumption is 94.4fJ/bit at10Gbit/s. Furthermore, lattice-shifted PCWs are utilized to enhance the opticalbandwidth by a factor of ~10X over other modulators based onnon-band-engineered PCWs and ring-resonators.

Broadband energy-efficient optical modulation by hybrid integration of silicon nanophotonics and organic electro-optic polymer