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In this work, we design, fabricate and characterize a compact, broadband andhighly sensitive integrated photonic electromagnetic field sensor based on asilicon-organic hybrid modulator driven by a bowtie antenna. The largeelectro-optic (EO) coefficient of organic polymer, the slow-light effects inthe silicon slot photonic crystal waveguide (PCW), and the broadband fieldenhancement provided by the bowtie antenna, are all combined to enhance theinteraction of microwaves and optical waves, enabling a high EO modulationefficiency and thus a high sensitivity. The modulator is experimentallydemonstrated with a record-high effective in-device EO modulation efficiency ofr33=1230pm/V. Modulation response up to 40GHz is measured, with a 3-dBbandwidth of 11GHz. The slot PCW has an interaction length of 300um, and thebowtie antenna has an area smaller than 1cm2. The bowtie antenna in the deviceis experimentally demonstrated to have a broadband characteristics with acentral resonance frequency of 10GHz, as well as a large beam width whichenables the detection of electromagnetic waves from a large range of incidentangles. The sensor is experimentally demonstrated with a minimum detectableelectromagnetic power density of 8.4mW/m2 at 8.4GHz, corresponding to a minimumdetectable electric field of 2.5V/m and an ultra-high sensitivity of0.000027V/m Hz^-1/2 ever demonstrated. To the best of our knowledge, this isthe first silicon-organic hybrid device and also the first PCW device used forthe photonic detection of electromagnetic waves. Finally, we propose somefuture work, including a Teraherz wave sensor based on antenna-coupledelectro-optic polymer filled plasmonic slot waveguide, as well as a fullypackaged and tailgated device.

Antenna-coupled silicon-organic hybrid integrated photonic crystal modulator for broadband electromagnetic wave detection