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We develop and characterize high index of refraction thin films by e-beam evaporation of Ti3O5, Ta2O5 and Nb2O5 in reactive, ion-assisted deposition processes. We then deposit broad bandwidth high reflection (HR) coatings based on quarter-wave stacks of these high index layers alternating with SiO2 low index layers. The HR band is centered at 1054 nm and designed for 45o angle of incidence. We compare the laser induced damage thresholds of these coatings in order to explore tradeoffs between their laser damage properties and HR bandwidths.

proceedings of spie, the international society for optical engineering/proceedings of spie

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5high index layers