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. We aim to study the short-wave infrared (SWIR), medium-wave infrared (MWIR), and long-wave infrared (LWIR) imaging ability based on optical readout bimaterial microcantilever focal plane array (FPA) uncooled infrared imaging system. First, the principle of the bimaterial microcantilever sensing and the fabrication of the microcantilever array are introduced. Second, the optical-thermal-mechanical sensing theories based on the FPA are given. Finally, an optical readout microcantilever FPA infrared imaging system is developed for SWIR, MWIR, and LWIR imaging experiments. The experimental results show that the system can acquire the clear images of the SWIR, MWIR, and LWIR targets.

Short-wave infrared, medium-wave infrared, and long-wave infrared imaging study for optical readout microcantilever array infrared sensing system