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We propose a deterministic figuring method for fabricating high-precision optical surfaces by combining ion beam material adding (IBA) and material removal [ion beam figuring (IBF)] technology. The IBA is first utilized to improve the accuracy and quality of the optical surface by deterministically adding material to the local pits, and then the IBF is applied to further improve the surface accuracy through removing the local protuberances. Compared with current IBF technology, this combined method can realize the uniform convergence of the surface errors and simultaneously increase the convergence rate of the figuring process. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method