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We have developed an extended gate field-effect-transistor (EGFET)-based carbon dioxide ( CO 2 ) sensing system with a packaged Ti/Ag/AgCl/KCl-gel microreference electrode using microelectro-mechanical systems (MEMS) technology. The total dimensions of the proposed CO 2 sensing system are only 2.8×1.5×0.1  cm , which is approximately 30 times smaller than a conventional CO 2 sensing system (including the commercial Ag/AgCl RE). All of the manufacturing processes adopted in this work are compatible with standard planar technology and are very suitable for mass production. The presented planar reference electrode shows a very small offset voltage ( −3.0  mV ) and a very small potential drift (2.5 mV in 30,000 s) that is approximately equal to that of the commercial Ag/AgCl RE (1.6 mV in 30,000 s). Additionally, the implemented EGFET-based CO 2 microsensor with a coated CO 2 solid electrolyte and gas permeable membranes on the gate sensing area demonstrates a very high sensitivity ( 44.4  mV/decade ) and very high sensing linearity (98.37%), while sensing CO 2 concentrations ranging from 0.25 to 50 mM. Furthermore, a very small hysteresis voltage (7.5 mV) was obtained during the sensing cycle of 2.5–5–25–50–25–5–2.5 mM; this result was achieved by improving the surface planarization and enlarging the sensing area of the EGFET to 1  mm 2 .

High-performance extended gate field-effect-transistor-based dissolved carbon dioxide sensing system with a packaged microreference electrode