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Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with non-ideal groove shapes Samuel K. Barber Lawrence Berkeley National Laboratory, 1 Cyclotron Road, M/S 2R0400, Berkeley, CA 94720-8199, USA +1-510-486-4077 TEL +1-510-486-7696 FAX Email address: SBarber@lbl.gov Erik H. Anderson Lawrence Berkeley National Laboratory, 1 Cyclotron Road, M/S 2R0400, Berkeley, CA 94720-8199, USA +1-510-486-4446 TEL +1-510-486-4955FAX Email address: EHAnderson@lbl.gov Rossana Cambie Lawrence Berkeley National Laboratory, 1 Cyclotron Road, 46R0125,

optical engineering

Stability of modulation transfer function calibration of surface profilometers using binary pseudo-random gratings and arrays with nonideal groove shapes