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Thermally activated selective topography equilibration (TASTE) enables thecreation of 3D structures in resist using grayscale electron-beam lithographyfollowed by a thermal treatment to induce a selective polymer reflow. A blazedgrating topography can be created by reflowing repeating staircase patterns inresist into wedge-like structures. Motivated by astronomical applications, suchpatterns with periodicities 840 nm and 400 nm have been fabricated in 130nm-thick PMMA using TASTE to provide a base for X-ray reflection gratings. Apath forward to integrate this alternative blazing technique into gratingfabrication recipes is discussed.

Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibration