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This paper describes the use of a high-stability quartz-crystal microbalance (QCM) to measure the mass of a gas absorbed on and in the metal electrode on the quartz oscillator, when the gas pressure is low and the gas can be considered as rigidly attached to the metal, so the viscosity effects are negligible. This provides an absolute measure of the total mass of gas uptake as a function of time, which can be used to model the kinetic processes involved. The technique can measure diffusion parameters of gases in metals close to room temperature at gas pressures much below one atmosphere, as relevant to surface processes such as atomic layer deposition and model studies of heterogeneous catalysis, whereas traditional diffusion measurements require temperatures over 400 °C at gas pressures of at least a few Torr. A strong aspect of the method is the ability to combine the “bulk” measurement of absorbed mass by a QCM with a surface-sensitive technique such as Auger electron spectroscopy in the same vacuum ch...

Using a high-stability quartz-crystal microbalance to measure and model the chemical kinetics for gases in and on metals: Oxygen in gold