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Al$_{x}$Cr$_{1-x}$ composite cathodes with Al contents of x = 0.75, 0.5 and0.25 were exposed to cathodic arc plasmas in Ar, N$_2$ and O$_2$ atmospheresand their erosion behaviour was studied. Cross-sectional analysis of theelemental distribution of the near-surface zone in the cathodes by scanningelectron microscopy revealed the formation of a modified layer for all cathodesand atmospheres. Due to intermixing of Al and Cr in the heat-affected zone,intermetallic Al-Cr phases formed as evidenced by X-ray diffraction analysis.Cathode poisoning effects in the reactive N$_2$ and O$_2$ atmospheres werenon-uniform as a result of the applied magnetic field configuration. With theexception of oxide islands on Al-rich cathodes, reactive layers were absent inthe circular erosion zone, while nitrides and oxides formed in the less erodedcentre region of the cathodes.

Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres