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A comprehensive model predicting the effects of plasma-induced damage (PID) on parameter variations in advanced metal–oxide–semiconductor field-effect transistors (MOSFETs) is proposed. The model focuses on the silicon recess structure (Si loss) in the source/drain extension region formed by high-energy ion bombardment during plasma etching. The model includes the following mechanisms: (1) damaged layer formation by ion impact and penetration, (2) Si recess structure formation by a subsequent wet etch, (3) MOSFET performance degradation, and (4) MOSFET parameter variation. Based on a range theory for plasma-etch damage, the thickness of the damaged layer exhibits a power-law dependence on the energy of the ion incident on the surface of Si substrate. Assuming that the damaged layer was formed during a gate or an offset spacer etch process, the depth of Si recess (dR) is a function of the depth profile of the created defect site (ndam), the wet-etch stripping time (tw), and the energy of the incident ion. It was found that dR also showed a power-law dependence on the average ion energy Ēion estimated from applied self-dc-bias voltage for various tw. As for MOSFET performance degradation, the threshold voltage (Vth) shifted and the shift (ΔVth) increased with an increase in Ēion and a decrease in gate length. This induces an increase in subthreshold leakage current (Ioff) for MOSFET. Technology computer-aided-design simulations were performed to confirm these results. By integrating the presented PID models, parameter variations could be predicted: Using a Monte Carlo method, it was demonstrated that PID increases parameter variations such as Vth and Ioff. It also was found that the variation in Ēion induces Vth and Ioff variations, comparable to that induced by other process parameter fluctuations such as dopant fluctuation and gate length. In summary, considering the effects of PID on parameter variations is vital for designing future ultralarge-scale-integrated circuits with billions of built-in MOSFETs

Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices