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We present a resonant approach to enhance 1550nm emission efficiency ofamorphous silicon sub-oxide doped with Er3+ (a-SiOx<Er>) layers with siliconnanoclusters (Si-NC). Two distinct techniques were combined to provide astructure that allowed increasing approximately 12x the 1550nm emission. First,layers of SiO2 were obtained by conventional wet oxidation and a-SiOx<Er>matrix was deposited by reactive RF co-sputtering. Secondly, an extra pumpchannel (4I15/2 to 4I9/2) of Er3+ was created due to Si-NC formation on thesame a-SiOx<Er> matrix via a hard annealing at 1150 C. The SiO2 and thea-SiOx<Er> thicknesses were designed to support resonances near the pumpingwavelength (~500nm), near the Si-NC emission (~800nm) and near the a-SiOx<Er>emission (~1550nm) enhancing the optical pumping process.

Resonant structures based on amorphous silicon sub-oxide doped with Er3+ with silicon nanoclusters for an efficient emission at 1550 nm