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We present evidence of the focusing effects of fine glass capillary optics for MeV He ion beams. The glass capillary optics are formed by a puller as to have inlet diameters of about 1 mm and outlet diameters of submicrons. The total length of the optics is about 50 mm. Impingent MeV ions to such optics are reflected by the inner wall several times, in a very similar process to the so-called surface channeling. The majority of incident ions are lost by the dechanneling, or large-angle scattering process, however, a part of them, actually about 1% more or less, is emitted through the outlet without significant energy loss. Compared with the conventional micro-ion beam facilities, the present method is certainly simple and lowcost, thus providing an easy method of submicron Rutherford backscattering spectrometry or particle induced x-ray emission analyses. In addition, if the ion species are extended to heavier elements, the present method provides versatile maskless ion implantation techniques.

Focusing of MeV ion beams by means of tapered glass capillary optics