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Abrasive jet micro-machining (AJM) is a promising technique to machine micro-features in brittle and ductile materials. However, the roughness of micro-channels machined using AJM is generally greater than that from other methods of micro-machining such as wet etching. Previous investigators have suggested that the roughness of AJM surfaces can be reduced by post-blasting with abrasive particles at a low kinetic energy. This approach was investigated by measuring the roughness reduction of a reference unmasked channel in borosilicate glass as a function of post-blasting particle size, shape, velocity, dose, and impact angle. The roughness of the reference channel decreased up to 70% of its initial value after post-blasting. It was found that post-blasting with smaller particles ultimately resulted in smoother surface, but at the penalty of requiring a relatively high particle dose, and consequently a significantly increased channel depth before reaching the steady-state roughness. Hence, finishing with small particles until reaching the steady-state is not practical when a shallow channel is desired.

Surface Finishing of Micro-channels Using Low Kinetic Energy Abrasives