English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Zendy Open

Presents the pdf analysis as premium feature

PDF Analysis

Insights

Presents the summarisation as premium feature

Summarisation

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the zaia usage as premium feature

ZAIA

Zendy Tools

Zendy Plus

Presents the access of premium content as premium feature

Premium Content

Semiconductor manufacturing is a capital-extensive industry. How to utilize billions of dollars of equipment as efficiently as possible is a critical factor for a semiconductor manufacturer to succeed in stiff competition. Improving performance of manufacturing process increases overall tool throughput, reduces operating costs, and saves companies millions of dollars. In this study, we develop a methodology to analyze and improve a cluster tool's performance. A Colored Petri Net model is developed to determine internal bottleneck resource of the tool. Results conclude that the methodology improves tool efficiency and provides significant cost savings.

Improving cluster tools performance using Colored Petri Nets in semiconductor manifacturing