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We have used a neon focused-ion-beam to fabricate both nanoscale Nb Dayem bridges and NbN phase-slip nanowires located at the short-circuited end of quarter-wavelength coplanar waveguide resonators. The Dayem bridge devices show flux-tunability and intrinsic quality factor exceeding 10 000 at 300 mK up to local fields of at least 60 mT. The NbN nanowires show signatures of incoherent quantum tunneling of flux at 300 mK.

Nonlinear Quantum Processes in Superconducting Resonators Terminated by Neon-Focused-Ion-Beam-Fabricated Superconducting Nanowires