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We have fabricated ultrafast dark count-free soft X-ray single-photon detectors (X-SNSPDs) from TaN with various conduction path widths, and we compare their properties with corresponding data from a Nb X-SNSPD. The TaN X-SNSPDs offer an improved detector performance regarding device detection efficiency, latching, and pulse amplitudes. Wide conduction paths allow for a certain energy-resolving capability in contrast to narrow TaN conduction paths. However, wide paths also limit the detection efficiency at low temperatures, which can be explained within a hot-spot model.

Soft X-Ray Single-Photon Detection With Superconducting Tantalum Nitride and Niobium Nanowires