Open AccessThin-Film MOSFET-Based Pressure Sensor
Author(s) -
Ethan L. W. Gardner,
Andrea De Luca,
J. Philippe,
Daniela Dragomirescu,
Florin Udrea
Publication year - 2019
Publication title -
ieee sensors letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.382
H-Index - 10
ISSN - 2475-1472
DOI - 10.1109/lsens.2019.2927694
Subject(s) - materials science , mosfet , cmos , optoelectronics , wheatstone bridge , microelectromechanical systems , pressure sensor , silicon on insulator , sensitivity (control systems) , electrical engineering , silicon , electronic engineering , transistor , nanotechnology , resistor , engineering , mechanical engineering , voltage
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