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Computer-generated hologram (CGH) is a diffractive optical element that has been commonly used as wavefront corrector in the interferometer and can be accurately manufactured to meet the requirements of high-precision detection. But the transmitted wavefront error (TWE) of the CGH substrate and the adjustment errors of cylindrical surface are influence factors of high accuracy measurement. In this paper, we propose the method of calibrating the CGH substrate TWE. After calibrating, the substrate TWE is 0.0052&#x03BB; (RMS). Meanwhile, we obtain the general expression for the misalignment aberrations by describing the relationship between the wavefront of the measured cylindrical mirror and the corresponding adjustment errors. Then the adjustment errors of the test cylindrical surface can be completely separated by subtracting the fitting function from the measurement on the basis of least-square algorithm. After that, the PV value changes from 3.0565&#x03BB; to 0.9825&#x03BB;, and the RMS value changes from 0.5278&#x03BB; to 0.1273&#x03BB;, the measurement results have been greatly improved.

Calibrating CGH Substrate TWE and Simulating Adjustment Error in Cylindrical Surface Measurement