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We demonstrate a high-precision, high robustness frequency offset locking method,which made the frequency offset between mode-locked laser and continuous-wave laser below less than 3 Hz. The coarse frequency lock control is realized by the feedback control of PZT with electrical delay line as the reference. The fine frequency compensation is realized by feed-forward control of an acousto-optic modulator. The fractional frequency instability was 7.4&#x00D7;10-10 for an averaging time of 1 s, 3.3&#x00D7;10-8 for an averaging time of 10 000 s when the narrow linewidth laser is free-running. In this experiment, the fractional frequency instability can be achieved at 1.1&#x00D7;10-15 for an averaging time of 1 s, at 3.6&#x00D7;10-18 for an averaging time of 10 000 s when the system is fine frequency locked. Compared with the unlocked laser, the fractional frequency instability can be improved about 5-6 orders of magnitude. This work lays the foundation for simple structure, high robustness and high precision laser frequency control situation, such as quantum precision measurement and optical lattice clocks.

A High-Precision Offset Frequency Locking Technique With Delay Line Reference and AOM-Based Compensation