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The coupling model of defect and organic contamination was presented to analyze the coupling effects on laser-induced damage and understand the damage degradation mechanism of optical films in a closed vacuum environment. The distributions of temperature rise around an absorbing defect in multilayer ZrO<sub>2</sub>/SiO<sub>2</sub> films were computed based on the finite-element simulation. Laser induced damage tests were made to compare with the theoretical model. Test results were in an agreement with the presented model and calculated results of a temperature rise.

Laser-Induced Thermal Damage Simulations of Optical Coatings Due to Intercoupling of Defect and Organic Contamination