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Since the advent of new nanotechnologies, the variability of gate delay due to process variations has become a major concern. This paper proposes a new gate delay model that includes impact from both process variations and multiple input switching. The proposed model uses an orthogonal polynomial based probabilistic collocation method to construct a delay analytical equation from circuit timing performance. From the experimental results, our approach has less that 0.2% error on the mean delay of gates and less than 3% error on the standard deviation.

A probabilistic collocation method based statistical gate delay model considering process variations and multiple input switching