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The ever increasing need for performance results in increasingly rigorous demands on throughput and positioning accuracy of high-precision motion systems, which often suffer from position dependent effects that originate from relative actuation and sensing of the moving-body. Due to the highly stiff mechanical design, such systems are typically controlled using rigid body control design approaches. Nonetheless, the presence of position dependent flexible dynamics severely limits attainable position tracking performance. This paper presents two extensions of the conventional rigid body control framework towards active control of position dependent flexible dynamics. Additionally, a novel control design approach is presented, which allows for shaping of the full closed-loop system by means of structured H &#x221E;  co-design. The effectiveness of the approach is validated through simulation using a high-fidelity model of a state-of-the-art moving-magnet planar actuator.

On modal observers for beyond rigid body H ∞ control in high-precision mechatronics *