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Visual defect inspection and classification are significant steps of most manufacturing processes in the semiconductor and electronics industries. Known and unknown defects on wafer maps tend to cluster, and these spatial patterns provide valuable process information for supporting manufacturing in determining the root causes of abnormal processes. In previous studies, data augmentation-based deep learning (DL) techniques were most commonly used for the identification of wafer map defect patterns (WMDP). Data augmentation is an effective technique for improving the accuracy of modern image classifiers. However, current data augmentation implementations were manually designed for the WMDP problem. In this study, we propose a DL-based method with automatic data augmentation for the WMDP task. Basically, it focuses on learning effective discriminative features, from wafer maps, through a deep network structure. The network consists of a convolution-based variational autoencoder (CVAE) sequentially. First, we pre-trained the CVAE on large training data in an unsupervised manner. Second, we fine-tuned the encoder of the CVAE, which was followed by a neural network (NN) classifier, in a supervised manner. Additionally, we describe a simple procedure for automatically searching for improved data augmentation policies. The policy mainly consists of five image processing functions: rotation, flipping, shifting, shearing range, and zooming. The effectiveness of the proposed method was demonstrated through experimental results obtained from a simulation dataset and a real-world wafer map dataset (WM-811K). This study provides guidance for the application of deep learning in semiconductor manufacturing processes to improve product quality and yield.

Unsupervised Pre-Training of Imbalanced Data for Identification of Wafer Map Defect Patterns